Gas filters, FG series, Wafergard® SG

Leverantör: ENTEGRIS INC
WGFGMBSS3 WGFGT1PS1 WGFGMBRR4 YY5001HR1 WGFGMBRR2 WGFGMBSS2 YY5032PR1 WGFG32PS1 WGFGMBSS4 YY5032PS1 WGFG02PR1 WGFG02PS1 WGFG50PR1 WGFGT1PR1 YY5002PR1 YY5001HS1
ENTEWGFGMBSS3EA 0 SEK
ENTEWGFGMBSS3 ENTEWGFGT1PS1 ENTEWGFGMBRR4 ENTEYY5001HR1 ENTEWGFGMBRR2 ENTEWGFGMBSS2 ENTEYY5032PR1 ENTEWGFG32PS1 ENTEWGFGMBSS4 ENTEYY5032PS1 ENTEWGFG02PR1 ENTEWGFG02PS1 ENTEWGFG50PR1 ENTEWGFGT1PR1 ENTEYY5002PR1 ENTEYY5001HS1
Gas filters, FG series, Wafergard® SG
Filter Gasfilter
Wafergard® SG FG series gas filters provide superior particulate filtration to maximise photovoltaic cell and display manufacturing production yields.

  • Complatible with high-purity gases including N₂, CDA, H₂, SiH₄ and NF₃
  • Superior downstream cleanliness with retention rate of 9 LRV at rated flow

Filter element: Hydrophobic PTFE membrane supported by molded PTFE, PFA structure and PFA O-ring; Housing: electropolished 316 L stainless steel

Maximum forward differential pressure: 4,14 bar at 23 °C

Maximum reverse differential pressure: 0,69 bar at 23 °C
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